Inficon UL6000 Fab - Replacing the SL200 Sniffer Line Filter

8 | Cleaning and maintenance INFICON
116 / 152 UL6000-Fab,-PLUS-Operating-instructions-iinc75en1-01-(2206)
4 Loosen the screws, which fix the filter mat on the metal sheet.
5 Replace the filter mat.
6 Secure the filter mat with the screws, insert the metal sheet and fix it with the
knurled screw.
8.4 Replacing the SL200 sniffer line filter
Structure of the
sniffer tip
Fig.14: Sniffer tip
1 Capillary filter (plastic; standard) 4 Cross-head screws
2 Felt pads 5 Sinter filter