INFICON Operation | 6
UL6000-Fab,-PLUS-Operating-instructions-iinc75en1-01-(2206) 93 / 152
V15
V13
V12
V11
V10
V9
V8
V7
V5
V4c
V2b
V2a
p4
p2
V14
p3
p1
MS
TL
Fig.13: The most important components of the vacuum diagram in UL6000 devices
1 Turbo molecular pump 2 (Booster TMP) 6 Mass spectrometer
2 Inlet flange 7 Turbo molecular pump 1
3 p1 … p4: Pressure measuring points 8 Pressure measuring point for flow monitoring
4 Internal calibration leak 9 Sniffer line
5 V2a, V2b … V15: Solenoid valves for
controlling gas flows
10 Backing pump
6.14 Resetting to factory settings
You can restore the device to factory settings.
Loss of settings and measurement data
After resetting to factory settings only the manufacturer factory settings are in the
memory of the device. The software of the device is not reset when restoring the
factory settings.
ü Supervisor rights
1 > Setup > General > Reset
2 Make your choice:
ð If you want to reset all settings, press the "Reset settings" button.
ð If you want to delete all recorded measurement data and user accounts,
press the "Delete data" button.
ð To reset the device to the factory settings, press both buttons one after the
other.