Inficon UL6000 Fab - Call Information on the Assemblies; Call the Energy Data Information; Call Information on the HYDRO•S

6 | Operation INFICON
86 / 152 UL6000-Fab,-PLUS-Operating-instructions-iinc75en1-01-(2206)
► > Device > Operating hours
► > Device > MSB
6.8.5 Call information on the assemblies
Diverse measurement values and information to the following assemblies is shown:
Preamplifier, ion source, turbo molecular pump (TMP), processor assembly MSB,
backing pump and its frequency converter.
► > Assemblies > Preamplifier
► > Assemblies > Ion source
► > Assemblies > TMP
► > Assemblies > TMP2
► > Assemblies > Backing pump
6.8.6 Call the energy data information
Various measured supply voltages and electrical powers are displayed.
► > Energy > Voltage (1)
ð In this window the first part of the information to the voltage is shown.
► > Energy > Voltage (2)
ð In this window the second part of the information to the voltage is shown.
► > Energy > Power
► > Energy > Current
6.8.7 Call information on the HYDRO•S
The internal parameters for HYDRO•S are displayed.
► > HYDRO•S