Inficon UL6000 Fab - Table of Contents

INFICON Table of contents
UL6000-Fab,-PLUS-Operating-instructions-iinc75en1-01-(2206) iii
Table of contents
1 About this manual .......................................................................................................................................... 8
1.1 Target groups........................................................................................................................................... 8
1.2 Warnings .................................................................................................................................................. 8
1.3 Definition of terms .................................................................................................................................... 8
2 Safety............................................................................................................................................................. 11
2.1 Intended use .......................................................................................................................................... 11
2.2 Duties of the operator............................................................................................................................. 13
2.3 Owner requirements............................................................................................................................... 13
2.4 Dangers.................................................................................................................................................. 13
3 Scope of delivery, transport, storage......................................................................................................... 15
4 Description.................................................................................................................................................... 18
4.1 Function ................................................................................................................................................. 18
4.2 Operation modes.................................................................................................................................... 18
4.2.1 Operation mode "Vacuum" ......................................................................................................... 18
4.2.2 Operation mode "Sniffing"........................................................................................................... 19
4.3 Design of device..................................................................................................................................... 20
4.3.1 Overall device .............................................................................................................................20
4.3.2 Control unit.................................................................................................................................. 23
4.3.2.1 START button .................................................................................................................... 24
4.3.2.2 STOP button ...................................................................................................................... 24
4.3.2.3 ZERO button...................................................................................................................... 25
4.3.2.4 Meaning of the button LEDs ..............................................................................................26
4.3.2.5 Meaning of the status LED ................................................................................................26
4.3.2.6 Design of touchscreen ....................................................................................................... 27
4.3.3 Vacuum connections................................................................................................................... 29
4.3.3.1 Inlet .................................................................................................................................... 29
4.3.3.2 Exhaust.............................................................................................................................. 29
4.3.3.3 Purge gas connection ........................................................................................................ 30
4.3.3.4 Venting connection ............................................................................................................30
4.3.4 Connections for accessories and control signals........................................................................ 31
4.3.5 Markings on the device ............................................................................................................... 32
4.4 Technical data........................................................................................................................................ 32
4.5 Factory settings...................................................................................................................................... 34