INFICON Description | 4
UL6000-Fab,-PLUS-Operating-instructions-iinc75en1-01-(2206) 35 / 152
Digital input pin 5 (IO1000) ZERO
Digital input pin 6 (IO1000) CAL
Digital input pin 7 (IO1000) Clear
Digital input pin 8 (IO1000) Purge
Digital input pin 9 (IO1000) Start/Stop
Digital input pin 10 (IO1000) No function
Machine factor vacuum mass 2 1
Machine factor vacuum mass 3 1
Machine factor vacuum mass 4 1
Leak rate filter I•CAL
Cathode Cathode 1 auto (can only be changed
by service)
Lower pressure limit SL200 capillary
clogged
0.1 mbar
Upper pressure limit SL200 capillary broken 1 mbar
Audio alarm TRIGGER
Audio alarm delay 60s
Notification beep On
Inlet area offset mass 2 1,3×10
-10
A (Modifiable by function
"Determine the background of the inlet
area [}74]")
Inlet area offset mass 3 6,7×10
-14
A (Modifiable by function
"Determine the background of the inlet
area [}74]")
Inlet area offset mass 4 3,3×10
-15
A (Modifiable by function
"Determine the background of the inlet
area [}74]")
Analog output IO1000 upper exponent -5
Pressure unit (display) mbar
Leak rate unit vacuum operation (display) mbar l/s
Leak rate unit sniffer operation (display) mbar l/s
Sniffer line light alarm configuration (SL3000
only)
Flashing
Sniffer line light brightness (SL3000 only) 5
Sniffer line beep (SL3000 only) Beep when setpoint 1
Operation mode Vacuum
Amplifier test during calibration On (can only be changed by service)
Alternating preamplifier ranges monitoring On (can only be changed by service)