Chapter 4 Mx-Series Unit Description 4-
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by the rack & pinion mechanism. A 6spindle modular head has Z1 ~ Z6
axes.
− Z-Axis Motors
Each spindle is equipped with a motor to move along Z axis. Wherever
necessary, the motor of each spindle carries out acceleration or
deceleration.
− R-Axis Motor
This motor is also called θ -axis motor and controls rotation of Z1~Z6
axes using three belts driven by one motor.
− Z-Spring
Puts the nozzle in the up position upon power off to prevent damage of
the nozzle and component.
− Limit Sensors
These sensors are used to set up/down limits of a head by hardware.
•Specification <Table 4-4> summarizes the modular head specification
<Table 4-4> Head specification