Agilent Technologies 5530 User Manual

Chapter 4 Angular Measurements
Angular Position Measurements
Measurements Reference Guide 4-57
Figure 4-30A. Typical setups for vertical and horizontal table axes
(Part 1 of 2)
* Retroreflector as moving
optic
** Interferometer as moving
optic
*
1 Laser head
2 Angular interferometer
2a Laser beam(s) at
interferometer
3 Angular reflector
3a Laser beam(s) at reflector
**
1
1
2
2
3
3
STRAIGHT
OTHER
STRAIGHT
OTHER
2a 3a
2a 3a

Agilent Technologies 5530 Specifications

General

Brand	Agilent Technologies
Model	5530
Category	Test Equipment
Language	English