Agilent Technologies 5530 - Page 130

Chapter 4 Angular Measurements
Angular Position Measurements
4-58 Measurements Reference Guide
Figure 4-30B. Typical setups for vertical and horizontal table axes
(Part 2 of 2)
1
Laser head
2 Angular interferometer
3 Angular reflector
2
3
1
3a
2
1
3
3a