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5530
Agilent Technologies 5530 User Manual
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Contents
Measurement
s Reference Guide
xi
Agilent
10768A Diagonal Measurement Kit and
Agilent
10769A Beam-Steering Mirror
51
A
Operating Specifications
Introduction
0-2
Index
12
14
Table of Contents
Table of Contents
5
About this Guide
15
Planning Your Measurements Introduction
18
Measurement Planning Guidelines
18
Planning and Storing a Calibration Program
20
Coordinating Multiple Types of Measurements
20
Triggering Options
21
Record Button
21
Auto
21
Encoder
22
Using Online Help
23
Linear Measurements
25
Introduction
26
Setting up for the Measurement
27
Placing and Using the Sensors
30
Mounting and Aligning the Optics on the Target Machine
33
Mounting the Optics
33
Aligning the Optics
44
Aligning the Laser Beam to the Machine's Travel Path for Long-Range Measurements
47
Aligning the Laser Beam to the Machine's Travel Path for Short-Range Measurements
49
Making the Measurement
50
Timebase Measurements Introduction
56
Setting up for the Measurement
57
Mounting and Aligning the Optics on the Target Machine
61
Aligning the Laser Beam to the Machine's Travel
61
Path
61
Making the Measurement
62
Analyzing Timebase Measurement Data
67
Displaying Timebase Measurement Data
68
Understanding Timebase Measurement Data
71
Angular Measurements Introduction
74
Setting up for a Pitch or Yaw Measurement
76
Mounting and Aligning the Optics on the Target Machine
78
Mounting the Optics
78
Aligning the Optics
88
Aligning the Laser Beam to the Machine's Travel Path for Long-Range Measurements
91
Aligning the Laser Beam to the Machine's Travel Path for Short-Range Measurements
92
Making the Measurement
92
Angular Position Measurements
96
Principles of Operation
97
Procedure - Summary
103
Programming the Machine to be Calibrated
104
Initial Setup of Computer and Laser Head
107
Mounting and Aligning the Precision Index Table on the Target Machine
109
Mounting and Aligning on a Rotary Table
109
Mounting and Aligning on a Machining Center
111
Choosing the Moveable Optic
114
Mounting the Moveable Optic
114
Creating the Control Link
117
Taking Care of the Measurement Fixture's Clutch
117
For Parallel Spindle and Table Axes
119
For Right-Angle Spindle and Table Axes
122
Mounting the Fixed Optic
126
Aligning the Laser Beam
128
Checking Your Installation
132
To Set the Machine's Relative Zero Point for Your Measurement
132
To Perform Final Optics Alignment and Integrity Check
133
Controlling the Machine During the Measurement
134
Manually Stepping through the Machine Control Program
134
Running the Machine Control Program
135
Making the Measurement
135
Storing the Hardware
139
Maintenance
139
Precision Index Table
139
Clutch
140
Clutch Breakaway Nut
143
Straightness Measurements Introduction
146
Setting up for the Measurement
148
Positioning the Laser Head and Target Machine
149
Positioning Optics for X-Axis and Y-Axis Measurements
150
Positioning Optics for Vertical Z-Axis Measurements
151
Positioning Optics for Horizontal Z-Axis Measurements
152
Mounting and Aligning Optics for X-Axis or Y-Axis Measurements
154
Mounting the Optics
154
Aligning the Optics
158
Making Vertical Axis Straightness Measurements
161
Aligning the Laser Beam to the Machine's Travel Path
166
Checking the Alignment for Beam Strength
168
Making the Measurement
169
Squareness Measurements in a Horizontal Plane Introduction
174
Setting up for the Measurement
176
Positioning the Laser Head and Target Machine
178
Mounting and Aligning the Optical Square and Interferometer for the First Axis Measurement
182
Mounting and Aligning Optics on a Machine with a Vertical Spindle
182
Mounting the Optics
182
Aligning the Optics
184
Mounting and Aligning Optics on a Machine with a Horizontal Spindle
186
Mounting the Optics
186
Aligning the Optics
187
Aligning the Laser Beam to the Machine's Travel Path for the First Axis Measurement
188
Mounting and Aligning the Reflector for the First Axis Measurement
189
Mounting the Reflector
189
Aligning the Reflector
189
Checking the Alignment for Beam Strength for the First Axis Measurement
192
Making the First Axis Measurement
192
Mounting and Aligning Optics for the Second Axis Measurement
196
Aligning the Laser Beam to the Machine's Travel Path for the Second Axis Measurement
198
Checking the Alignment for Beam Strength for the Second Axis Measurement
199
Making the Second Axis Measurement
199
Squareness Measurements in a Vertical Plane Introduction
202
Setting up for the Measurement
204
Positioning the Laser Head and Target Machine
206
Mounting and Aligning the Optics for the First Axis Measurement
207
Aligning the Laser Beam to the Machine's Travel Path for the First Axis Measurement
209
Checking the Alignment for Beam Strength for the First Axis Measurement
209
Making the First Axis Measurement
209
Mounting and Aligning Optics for the Second Axis Measurement
213
Mounting the Optics
213
Aligning the Optics
216
Aligning the Laser Beam to the Machine's Travel Path for the Second Axis Measurement
222
Checking the Alignment for Beam Strength for the Second Axis Measurement
223
Making the Second Axis Measurement
224
Parallelism Measurements Introduction
226
Setting up for the Measurement
228
Positioning the Laser Head and Target Machine
230
Mounting and Aligning Optics for Coplanar Parallelism Measurements
235
Mounting and Aligning Optics for Spindle Parallelism Measurements
235
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Agilent Technologies 5530 Specifications
General
Brand
Agilent Technologies
Model
5530
Category
Test Equipment
Language
English
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