Chapter 9 Flatness Measurements
Assembling and Mounting the Optics
Measurements Reference Guide 9-15
Figure 9-6. Centering the leading and trailing feet over the measurement
line
2 Attach the angular interferometer to a flatness mirror base (Figure 9-7).
Follow these guidelines.
If you are not using flatness mirrors, attach the interferometer so the side
of the interferometer with one opening faces the laser head and one of the
closed sides faces the flatness mirror.
If you are using flatness mirrors, attach the interferometer so the side of
the interferometer with one opening faces the flatness mirror. In the
remainder of this chapter, this assembly of the interferometer, flatness
mirror, and flatness mirror base is referred to as the “interferometer
assembly.”
1
Foot spacer
2 Trailing foot
3 Leading foot
4 Measurement line
5 Station
6 Direction of travel
1
2
3
5
6
4
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