Agilent Technologies 5530 - Page 262

Chapter 9 Flatness Measurements
Assembling and Mounting the Optics
9-16 Measurements Reference Guide
Figure 9-7. Attaching the interferometer to a flatness mirror base
A
Attaching the interferometer
if using a flatness mirror
B Attaching the interferometer
if not using a flatness mirror
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1 Angular interferometer
2 Turning mirror
3 Turning mirror base
4 Attachment screws
1
1
0
7
7
0
A
A
N
G
U
L
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I
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M
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1
A
01
0
1
2
3
4
1
2
3
A
B
1
0
7
7
0
A
A
N
G
U
L
A
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I
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E
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O
M
E
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E
R