Agilent Technologies 5530

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Chapter 9 Flatness Measurements

Positioning the Laser Head

Measurements Reference Guide 9-21

Figure 9-10. Initially positioning the laser head and straightedge if flatness mirrors are not

required

Laser head

2 Surface plate

3 Straightedge positioned

along the first

measurement line

4 Nameplate

1 234

Main Page

Table of Contents5
About this Guide15
Planning Your Measurements Introduction18
Measurement Planning Guidelines18
Planning and Storing a Calibration Program20
Coordinating Multiple Types of Measurements20
Triggering Options21
Record Button21
Auto21
Encoder22
Using Online Help23
Linear Measurements25
Introduction26
Setting up for the Measurement27
Placing and Using the Sensors30
Mounting and Aligning the Optics on the Target Machine33
Mounting the Optics33
Aligning the Optics44
Aligning the Laser Beam to the Machine's Travel Path for Long-Range Measurements47
Aligning the Laser Beam to the Machine's Travel Path for Short-Range Measurements49
Making the Measurement50
Timebase Measurements Introduction56
Setting up for the Measurement57
Mounting and Aligning the Optics on the Target Machine61
Aligning the Laser Beam to the Machine's Travel61
Path61
Making the Measurement62
Analyzing Timebase Measurement Data67
Displaying Timebase Measurement Data68
Understanding Timebase Measurement Data71
Angular Measurements Introduction74
Setting up for a Pitch or Yaw Measurement76
Mounting and Aligning the Optics on the Target Machine78
Mounting the Optics78
Aligning the Optics88
Aligning the Laser Beam to the Machine's Travel Path for Long-Range Measurements91
Aligning the Laser Beam to the Machine's Travel Path for Short-Range Measurements92
Making the Measurement92
Angular Position Measurements96
Principles of Operation97
Procedure - Summary103
Programming the Machine to be Calibrated104
Initial Setup of Computer and Laser Head107
Mounting and Aligning the Precision Index Table on the Target Machine109
Mounting and Aligning on a Rotary Table109
Mounting and Aligning on a Machining Center111
Choosing the Moveable Optic114
Mounting the Moveable Optic114
Creating the Control Link117
Taking Care of the Measurement Fixture's Clutch117
For Parallel Spindle and Table Axes119
For Right-Angle Spindle and Table Axes122
Mounting the Fixed Optic126
Aligning the Laser Beam128
Checking Your Installation132
To Set the Machine's Relative Zero Point for Your Measurement132
To Perform Final Optics Alignment and Integrity Check133
Controlling the Machine During the Measurement134
Manually Stepping through the Machine Control Program134
Running the Machine Control Program135
Making the Measurement135
Storing the Hardware139
Maintenance139
Precision Index Table139
Clutch140
Clutch Breakaway Nut143
Straightness Measurements Introduction146
Setting up for the Measurement148
Positioning the Laser Head and Target Machine149
Positioning Optics for X-Axis and Y-Axis Measurements150
Positioning Optics for Vertical Z-Axis Measurements151
Positioning Optics for Horizontal Z-Axis Measurements152
Mounting and Aligning Optics for X-Axis or Y-Axis Measurements154
Mounting the Optics154
Aligning the Optics158
Making Vertical Axis Straightness Measurements161
Aligning the Laser Beam to the Machine's Travel Path166
Checking the Alignment for Beam Strength168
Making the Measurement169
Squareness Measurements in a Horizontal Plane Introduction174
Setting up for the Measurement176
Positioning the Laser Head and Target Machine178
Mounting and Aligning the Optical Square and Interferometer for the First Axis Measurement182
Mounting and Aligning Optics on a Machine with a Vertical Spindle182
Mounting the Optics182
Aligning the Optics184
Mounting and Aligning Optics on a Machine with a Horizontal Spindle186
Mounting the Optics186
Aligning the Optics187
Aligning the Laser Beam to the Machine's Travel Path for the First Axis Measurement188
Mounting and Aligning the Reflector for the First Axis Measurement189
Mounting the Reflector189
Aligning the Reflector189
Checking the Alignment for Beam Strength for the First Axis Measurement192
Making the First Axis Measurement192
Mounting and Aligning Optics for the Second Axis Measurement196
Aligning the Laser Beam to the Machine's Travel Path for the Second Axis Measurement198
Checking the Alignment for Beam Strength for the Second Axis Measurement199
Making the Second Axis Measurement199
Squareness Measurements in a Vertical Plane Introduction202
Setting up for the Measurement204
Positioning the Laser Head and Target Machine206
Mounting and Aligning the Optics for the First Axis Measurement207
Aligning the Laser Beam to the Machine's Travel Path for the First Axis Measurement209
Checking the Alignment for Beam Strength for the First Axis Measurement209
Making the First Axis Measurement209
Mounting and Aligning Optics for the Second Axis Measurement213
Mounting the Optics213
Aligning the Optics216
Aligning the Laser Beam to the Machine's Travel Path for the Second Axis Measurement222
Checking the Alignment for Beam Strength for the Second Axis Measurement223
Making the Second Axis Measurement224
Parallelism Measurements Introduction226
Setting up for the Measurement228
Positioning the Laser Head and Target Machine230
Mounting and Aligning Optics for Coplanar Parallelism Measurements235
Mounting and Aligning Optics for Spindle Parallelism Measurements235

Agilent Technologies 5530 - Page 267

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