Chapter 9 Flatness Measurements
Aligning the Optics
9-22 Measurements Reference Guide
Figure 9-11. Initially positioning the laser head and straightedge if flatness mirrors are not
required
2 Adjust the laser head to the approximate height at which you will mount
the optics.
You are now ready to align the optics to the laser beam.
Aligning the Optics
This section explains optics alignment procedures for setups with and
without flatness mirrors. Before completing the steps in this section,
ensure that the interferometer on a foot spacer or interferometer assembly
is flush with the straightedge and is outside the measurement grid.
NOTE To use these procedures, you need to know where the laser beam is,
relative to an optic. To see the laser beam, you may need to hold a piece of
paper in the laser beam path in front of the optic.
1
Laser head
2 Surface plate
3 Straightedge positioned
along the first measurement
line
4 Nameplate
5 Flatness mirror with base
3
1
2
1
0
7
7
0
A
A
N
G
U
L
A
R
I
N
T
E
R
F
E
R
O
M
E
T
E
R
H
E
W
L
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T
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-
P
A
C
K
A
R
D
1
A
0
1
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1
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4
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