Agilent Technologies 5530 User Manual

Chapter 2 Linear Measurements
Mounting and Aligning the Optics on the Target Machine
Measurements Reference Guide 2-11
Figure 2-5. Positioning of linear optics
A
Measurement along
the X-axis
B Measurement along
the Y-axis with the
laser beam bent
horizontally 90° to
the retroreflector
C Measurement along
the Z-axis with the
laser beam bent
vertically 90° to the
optics
***********************
1 Retroreflector
mounted on a height
adjuster with a base
and post
2 Interferometer
assembly mounted
in a spindle
3 Laser beam
4 Laser head
5 Retroreflector
mounted in a spindle
6 Interferometer
assembly mounted
on a height adjuster
with a base and post
2
2
1
6
5
4
4
4
A
B
C
3
3
3
1

Agilent Technologies 5530 Specifications

General

Brand	Agilent Technologies
Model	5530
Category	Test Equipment
Language	English