Agilent Technologies 5530 - Page 80

Chapter 4 Angular Measurements
Mounting and Aligning the Optics on the Target Machine
4-8 Measurements Reference Guide
Figure 4-3. Positioning optics for pitch measurements
A
Measurement along the
X-axis
B Measurement along the
Y-axis
C Measurement along the
Z-axis with the laser
beam bent vertically 90°
to the optics
***********************
1 Angular reflector
mounted on a height
adjuster with a post and
base
2 Angular interferometer
mounted in a spindle
3 Laser beam
4 Laser head
5 Angular reflector
mounted in a spindle
6 Angular interferometer
mounted on a height
adjuster with a post and
base
1
2
34
1
2
5
6
A
B
C
4
3
43