Agilent Technologies 5530 - Page 81

Chapter 4 Angular Measurements
Mounting and Aligning the Optics on the Target Machine
Measurements Reference Guide 4-9
Figure 4-4. Positioning optics for yaw measurements
A
Measurement along the
Y-axis
B Measurement along the
X-axis
C Measurement along the
Z-axis with the laser
beam bent vertically 90°
to the reflector
***********************
1 Angular reflector
mounted on a height
adjuster with a post and
base
2 Angular interferometer
mounted in a spindle
3 Laser beam
4 Laser head
5 Angular interferometer
mounted on a height
adjuster with a post and
base
6 Angular reflector
mounted in a spindle
1
2
6
5
1
1
0
7
8
5
A
H
E
I
G
H
T
A
D
J
U
S
T
E
R
A
1
0
7
8
5
A
H
E
I
G
H
T
A
D
J
U
S
T
E
R
A
4
3
4
3
4
3
A
B
C
2