Agilent Technologies 5530 - Page 83

Chapter 4 Angular Measurements
Mounting and Aligning the Optics on the Target Machine
Measurements Reference Guide 4-11
Figure 4-5. Interferometer assembly for pitch measurements along the
X-axis or Y-axis
Figure 4-6. Interferometer assembly for yaw measurements along the
X-axis or Y-axis
1
Angular
interferometer
2 Height adjuster and
post
3 Base
1
0
7
8
5
A
H
E
I
G
H
T
A
D
J
U
S
T
E
R
A
2
1
3
1 Angular
interferometer
2 Height adjuster and
post
2
1
1
0
7
7
0
A
A
N
G
U
L
A
R
I
N
T
E
R
F
E
R
O
M
E
T
E
R
1A0101
1
0
7
8
5
A
H
E
I
G
H
T
A
D
J
U
S
T
E
R
A