Edwards SCU-800 - Page 22

SCU-800 Control Unit for Turbomolecular Pump
MT-49E-101-G
Page 10
2
TECHNICAL DATA
Operation switch
START
(Push-button switch•Green)
STOP
(Push-button switch•Dark Grey)
RESET
(Push-button switch•Grey)
SELECT
(Push-button switch•Grey)
UP
(Push-button switch•Grey)
DOWN
(Push-button switch•Grey)
ENTER
(Push-button switch•Grey)
MANUAL/REMOTE changeover
(Slide switch•White)
Panel indication LED
ACCEL.
(Green LED)
NORMAL
(Green LED)
BRAKE
(Green LED)
TEMP CTRL
(Green LED)
POWER
(Green LED)
FAILURE
(Red LED)
REMOTE
(Green LED)
Panel display
LCD
(2 lines of 20 characters)
Input/Output terminal
AC POWER X2
(3 pins)
P.CONNECTOR X1
(60 pins)
TMS X5
(26 pins)
REMOTE X7
(37 pins)
COM1 X3A/X3B
(9 pins × 2)
COM2 X6
(9 pins)
STP-LINK X8
(8 pins)
Safety function
Electromagnetic bearing failure detection
STP pump overheat detection
Motor driver overload detection
Power failure detection
STP pump overspeed detection
STP control unit overheat detection
TMS unit failure detection
Air-cooling fan failure detection
Other failure detection