SCU-800 Control Unit for Turbomolecular Pump
SERIAL COMMUNICATION
PROTOCOL
8-bits hexadecimal coded
ASCII
8-bits hexadecimal coded
ASCII
8-bits hexadecimal coded
ASCII
*1
The maximum number of errors may differ depending upon the software version of SCU-800. It is recommended that an
application be designed as variable-length data.
*2
Value corresponding to the error message is transmitted, (refer to Table 22 and Table 23). The most recent error has the
largest parameter number. When the number of errors being detected is under the maximum number, the value of
parameter that is larger than the number of errors being detected is set to 0.
Example:
: 0D
hex
= 13 = Disturbance Xh
: 0F
hex
= 15 = Disturbance Xb
: 00
hex
= No error detected