6270A
Service Manual
ii
G- and B-Series Valves ..................................................................... 39
Remove and Inspect the B-Series Valves ..................................... 40
Install the B-Series Valves ............................................................. 43
Remove and Inspect the G-Series Valves ..................................... 44
Install the G-Series Valves ............................................................ 44
Power Supply and Fan .......................................................................... 45
Remove the Power Supply ................................................................ 46
Remove the Fan ................................................................................ 48
Remove the Power Entry Module ...................................................... 49
Front Panel and Display Assembly ....................................................... 50
Remove Front-Panel Assembly ......................................................... 50
Remove Keypad PCA and Knob from the Front-Panel Assembly ..... 52
Remove Display Components from the Display Panel Shell ............. 54
Remove the Module Bay Latch Assembly ......................................... 57
PCM Assembly ...................................................................................... 59
Replace the Control Valves ............................................................... 62
Inspect the Control Valves ................................................................. 64
PCM Supply, Test, Exhaust Sensor Alignment ................................. 66
Calibrate the Sensors ........................................................................ 67
Supply Port (ATM and 3,000 psi) ...................................................... 68
Exhaust Port (Hard Vacuum then ATM) ............................................ 70
Calibration Sled and PMM ..................................................................... 70
PM200 and PM600 Modules ................................................................. 72
PM600 Digital Barometer Optimization ................................................. 73
Setup ................................................................................................. 73
Return to Service – Safety Validation Recommendations ..................... 75
Electrical ............................................................................................ 75
Pressure ............................................................................................ 75
Calibration Adjustment .......................................................................... 76
PM200 ............................................................................................... 76
PM600 ............................................................................................... 77
Calibration and Adjustment Procedures ................................................ 78
Required Equipment .......................................................................... 78
Preliminary Operations ...................................................................... 80
Setup ................................................................................................. 81
Module Calibration ................................................................................ 84
Calibration of Modules in Chassis ..................................................... 84
Calibration of Modules in Calibration Sled ......................................... 85
Calibration Tables ................................................................................. 88
PM200 Calibration Definition ............................................................. 88
PM600 Calibration Definition ............................................................. 89
PM200 Test Definition Matrices ......................................................... 90
PM600 Test Definition Matrices ......................................................... 102
Calibration with COMPASS for Pressure .......................................... 110
Troubleshooting ..................................................................................... 111
Reset Controller Settings ................................................................... 113
Diagnostics ........................................................................................ 113
System ............................................................................................... 114
Measure ............................................................................................. 114
Control ............................................................................................... 115
Leak Test ........................................................................................... 115
Remote Interface ............................................................................... 116
Contamination Prevention System (CPS) ............................................. 116
CPS Cleaning and Inspection ............................................................ 116
Separate the Lower and Upper Housing ....................................... 120