Inficon IC6 - Page 199

10 - 29
IPN 074-505-P1E
IC6 Operating Manual
31
(0x1f)
Idle Power
(%)
0.0/ 99.99/
0.0
REAL_4X2
32
(0x20)
Idle Ramp Time
(seconds)
(mm:ss)
0/ 5999/ 0
0/ 99:59/ 0
Time
See Time Note
33
(0x21)
Rate
(Å/s)
0/ 999.9/ 0 REAL_
4F31
34
(0x22)
Time Limit
(seconds)
(mm:ss)
0/ 5999/ 0
0/ 99:59/ 0
Time
See Time Note
35
(0x23)
Rate Filter Time
(seconds)
0/ 6/ 0 Encode 0 = 0.1 1 = 0.4 2 = 1.0
3 = 4.0 4 = 10.0
5 = 20.0 6 = 30.0
36
(0x24)
Time Power Avg
Time (Minutes)
0/ 30/ 0 Integer
37
(0x25)
Ion Assist Deposit 0/ 1/ 0 Encode 0 = No, 1 = Yes Update not allowed if
material is running.
38
(0x26)
On Final Thickness 0/ 2/ 1 Encode 0 = Continue, 1 = Post-Dep
2 = NonDepCont
39
(0x27)
Ramp 1 Rate
(Å/s)
0/ 999.9/ 0 REAL_
4F31
40
(0x28)
Start Ramp 1
(KÅ)
0/ 999.999/
0
REAL_
4F31
Value must be less than Start Ramp 2 thickness
value if Start Ramp 2 thickness value is non-zero.
41
(0x29)
Ramp 1 Time
(seconds)
(mm:ss)
0/ 5999/ 0
0/ 99:59/ 0
Time
See Time Note
42
(0x2a)
Ramp 2 Rate
(Å/s)
0/ 999.9/ 0 REAL_
4F31
43
(0x2b)
Start Ramp 2
(KÅ)
0/ 999.999/
0
REAL_
4F31
Value must be greater than Start Ramp 1 thickness
value.
Table 10-9 Material parameters (continued)
QM
&
UM
Cmnd
ID
Name
(Units)
Range:
Low Limit/
High Limit/
Default
Data Type
Notes
Update Restrictions
and Display Notes