EasyManua.ls Logo

Inficon UL6000 Fab - Page 111

Inficon UL6000 Fab
152 pages
To Next Page IconTo Next Page
To Next Page IconTo Next Page
To Previous Page IconTo Previous Page
To Previous Page IconTo Previous Page
Loading...
INFICON Warning and error messages | 7
UL6000-Fab,-PLUS-Operating-instructions-iinc75en1-01-(2206) 111 / 152
Type Notification Possible sources of
error
Remedy
W618 I-BOOST leak rate dropped
faster than expected (5 s
message)
The 'I-BOOST time
constant' for the
connected vacuum
system has not yet
been determined or
something has been
changed on the
connected vacuum
system after
determining the 'I-
BOOST time constant
Perform the procedure for determining the
'I-BOOST time constant' again
W619 I-BOOST leak rate dropped
faster than expected (30 s
message)
The 'I-BOOST time
constant' for the
connected vacuum
system has not yet
been determined or
something has been
changed on the
connected vacuum
system after
determining the 'I-
BOOST time constant
Perform the procedure for determining the
'I-BOOST time constant' again
W625 Leak rate of internal
calibration leak not yet set
EEPROM parameter
was reset
Enter the correct leak rate for the internal
calibration leak

Table of Contents

Related product manuals