XY gantry : 0.001 mm
Head R : 0.044 deg
Head Z : 0.0035 mm
XY gantry : 0.001 mm
Head R : 0.044 deg
Head Z : 0.0035 mm
Precision R : 0.0055 deg
Precision Z : 0.0035mm
37.5±0.5 inch SMEMA
910+30,-10mm(option)
Left to Right (Standard)
Right to Left (option)
3phase, 50/60 Hz
208V/220V/230V/240V
Option: 380V/400V/415V
About 180 Nl/min About 160 Nl/min
Ambient Temperature & Humidity
15℃~32 ,℃ 30~75% (No dewdrops should form)
Dimension (W×D×H),
Cover Only
Appendix A-3
A. Mx-Series Specification Sheet-Mx400(S)/P(S)
Optimal: 0.09 sec/chip, (0.116
sec/cip)
CPH : 42,000 (IPC9850), (31,000)
Optimal: 0.116 sec/chip, (0.124 sec/chip)
CPH : 31,000 (IPC9850), (21,000)
6 Module Head+6Module Head
6 Module Head +3 Precision Head
(Option:3P+3P)
Number of Axes
※ R= Rotate
※ P= Precision
6 Z-Axis, 1 R-Axis / 3 PZ-Axis,3PR-Axis
500mm/sec,Programable(3 stages: High, medium and low speeds)
Front (Standard)
/ Rear (Option)
Auto Width Adjust & Soft Stop
Chip:10 mm,Precidion:20 mm/19.5mm