Pfeiffer Vacuum ASM 310 - Units of Pressure; Gas Throughputs; Dimensions

11.3 Units of pressure
Unit mbar bar Pa hPa kPa Torr / mm Hg
mbar 1
1 · 10
-3
100 1 0.1 0.75
bar 1000 1
1 · 10
5
1000 100 750
Pa 0.01
1 · 10
-5
1 0.01
1 · 10
-3
7.5 · 10
-3
hPa 1
1 · 10
-3
100 1 0.1 0.75
kPa 10 0.01 1000 10 1 7.5
Torr / mm Hg 1.33
1.33 · 10
-3
133.32 1.33 0.133 1
1 Pa = 1 N/m
2
Tbl. 1: Units of pressure and their conversion
11.4 Gas throughputs
Unit mbar l/s
Pa m
3
/s
sccm Torr l/s
atm cm
3
/s
mbar l/s 1 0.1 59.2 0.75 0.987
Pa m
3
/s
10 1 592 7.5 9.87
sccm
1.69 · 10
-2
1.69 · 10
-3
1
1.27 · 10
-2
1.67 · 10
-2
Torr l/s 1.33 0.133 78.9 1 1.32
atm cm
3
/s
1.01 0.101 59.8 0.76 1
Tbl. 2: Gas throughputs and their conversion
11.5 Dimensions
(mm)
81
62
254
415
450
350
Technical data and dimensions
79/98