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Phenom ProX - Routine Pages; Source Tilt; Storesys(Tem)Info

Phenom ProX
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Notes!
5.7.3 StoreSys(tem)Info
If a problem occurs you can touch StoreSysInfo to store a file with the current system
i
nformation on the USB Flash drive (fig. 1,10).
> The file will be named SysInfo_<MachineID>_yyyy-mm-dd_hh-mm-ss.xml.gz
and can be found in the feico folder on the USB Flash drive.
The system information file can be sent to the Phenom help desk:
support@phenom-world.com
5.7.4 Routine pages
In the Source Tilt and Stigmate pages you can optimize and store viewing conditions for
electron imaging. In the Network and Connectivity pages you can configure your network
settings and configure and activate the Phenom Remote Assistant, in the Service page
you can select a different screen type.
You can navigate throught the Routine pages, using the < and > buttons in the top-
right corner of the screen. With > you select the next Routine page; with < you go
back to the previous Routine page.
For setting the working distance and loading the sample, refer to 4.3’ Loading
s
amples’; for unloading the sample, refer to 4.9 ‘Unloading the sample’.
5.7.4.1 Source Tilt
Here you can align the Phenom electron beam (optimize the illumination intensity).
Alignment has to be made in electron imaging mode. When in optical imaging mode, first
select electron imaging mode by touching (fig. 3,10) or press the Manual button on the
Source Tilt screen that appears after pressing .
Touch the button in the selection bar.
> The SourceTilt screen appears.
Auto alignment
When using the Auto alignment function, the sample surface should be homogeneous and
not contain large contrast differences.
1 Touch Auto to start an automatic Source Tilt alignment.
> The Phenom electron beam will now automatically be aligned. This usually takes a
few seconds but in some situations may take several minutes.
> Adjustments made on the X and Y axis are visible on the screen.
When automatic Source Tilt alignment is finished, you can fine-tune the adjustment
manually, using the rotary knob as described in ‘Manual alignment’, hereafter.
2 Touch
to save the adjustment or ‘8 to reset the previous settings and quit
Source Tilt setting.
3 When finished, touch > to select the next Routine page (Stigmate).
PW_Phenom_Pro_X_Pro_Pure_Print:PW_Phenom_G2_Pro_G2_Pure 19-11-13 20:55 Pagina 43

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