Servomex SERVOPRO Plasma User Manual

Plasma Gas Analyzer
11 02001001A_9
2.5 Calibration gas

The calibration gases must be clean, non-corrosive, free from oil and
condensates and compatible with the materials listed in Appendix 1
High calibration set point At least 90% FSD N
2
in Ar or He
Low calibration set point 6N Grade Ar or He
2.6 Performance
Detector type:
Plasma Emission Detector (PED). Material:
Quartz, single element, vacuum tight to 69 kPa (10
Psig)
Ranges:
Display Resolution:
Choice of one of the following -
 0-1/0-10/0-100 ppm
 0-10/0-50/0-100 ppm
 0-10/0-50/0-250 ppm
(3)
 0-10/0-100/0-1000ppm
(3)
0-1 ppm range: 10 ppb
0-10 ppm range: 0.1 ppm
0-50ppm range: 0.5 ppm
0-100, 250, 500, 1000 ppm ranges: 1ppm
Auto-zero, auto-span calibration system: (optional)
Serial port: RS-232 (optional)
Digital output: 3 range indication, 1 system status
0-1/ 0-10 /0-100
ppm
0-10 /0-50/ 0-100
ppm
0-10/ 0-50/ 0-250
ppm
(3)
0-10/ 0-100/
0-1000 ppm
(3)
Accuracy
(1)
 ±1% Range
(2)
 ±1% Range
(2)
 ± 5% Range
(2)
 ± 5% Range
(2)
Drift over 24
hours
 ±1% Range
(2)
 ±1% Range
(2)
 ± 1% Range
(2)
 ±1% Range
(2)
Noise
(1)
 ± 1% Range
(2)
 ± 1% Range
(2)
 ± 5% Range
(2)
 ± 5% Range
(2)
Zero temp
coefficient
 ± 0.25 ppm/10°C
 ± 0.25 ppm/10°C
 ± 0.63 ppm /10°C
 ± 2.5 ppm/10 °C
(1) The accuracy may be decreased by an additional 6% maximum range at some frequencies under the influence of
radiated RF fields specified for industrial environments.
(2) Calibrated Range
(3) N2 in Ar only

Servomex SERVOPRO Plasma Specifications

General

Brand	Servomex
Model	SERVOPRO Plasma
Category	Measuring Instruments
Language	English