Plasma Gas Analyzer
37 02001001A_9
5.5.1 Error and Alarm Historic
This menu is very useful. You can see the last 25 alarms with the time and the date. Pressing
“F1” from the DIAGNOSTIC MAIN MENU brings you the newest errors and “F2” the oldest.
For example, if a low flow error occurs at 9:34:37, the error and alarm historic menu will display
the “LOW FLOW” message with the hour and the date. When the flow is restored, the same
message is displayed with “OK”. For example, if the low flow is restored at 10:23:01, the error
and alarm historic menu will display “LOW FLOW: OK” with the date and the time as in the
figure below.
Figure 26 - DIAGNOSTIC MENU
Below is a list of possible errors and their significance:
LOW FLOW: The flow on sample is smaller than 10 cc/min (10 sccm).
PLASMA OFF: The plasma is shut down. Occurs when there is low flow for 30 seconds or when
the starting count is not reached.
STARTING: The plasma is trying to start.
WAITING: The system is waiting to preserve the valve. This error occurs 1 minute after the
plasma is turning off. The system waits 2 minutes before trying to re-open the valve.
OVER SCALE: The impurities value is greater than scale.
UNDER SCALE: The impurities value is smaller than scale.
ALARM 1: Alarm 1 set point is reached.
ALARM 2: Alarm 2 set point is reached.
AUTCAL FAIL: This error occurs when the auto calibration failed.
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