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4D User Manual
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13.3 Detector properties PSD 2D (Detector A, or Detector B)
Resolution of the detectors: 10 nm … 200 nm, only noise limited,
no quantization (like CCD/CMOS)
(depending on measurement bandwidth,
selected gain, environment light,…)
Signal to Noise Ration: < 0.1 mV rms at +/-10 Volts voltage range (10
-4
)
Detector area: Standard Position Detector: 9mm x 9mm
Standard Angle Detector: 4mm x 4mm,
in focus of a lens, f = 300 mm
(other detector areas: 2mm x 2mm, 12mm x 12mm, others on request
Rise time of the detectors 10 µs, or filtered, regarding ordered laser rep rate
(of other detector variants: 1 µs, 2 µs, please contact TEM Messtechnik)
Filter bandwidth limitation: 10 kHz, selectable
detector case size: 40 x 40 x 52 mm
connector: HD15 (VGA) male (at rear or at any side)
(Pinning: see "Connectors and Cables")
13.4 Detector properties PSD 4D i
(same as before)
13.5 Actuator properties BeamScan 2D One Inch
Dimensions: 30 mm length, 25 mm diameter in the front part
20 mm diameter in the rear part
fitting into most 1 " mirror holders
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