Agilent Technologies Helium Leak Detector
DRAFT 12/11/17
123
Figure 7-10 Leak Detector Vacuum System Diagram
* Normally open valve, powered closed during all operations. ** Model G8610B, G8611C,
G8612C, G8611B during the roughing sequence.
Test Port
Spectrometer
Test Port thermocouple
Calibrated Leak
V5
V4
V2 V3
V6
V7
V1
V1 Foreline
V2 Contraflow1
V3 Contraflow2
V4 Midstage1
V5 Midstage2
V6 Cal Leak
V7 Vent
*V8 Exhaust
*
V8
**
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