VS Series Helium Mass Spectrometer Leak Detectors
DRAFT 4/23/15
B-9
❑ Semiconductor process tools
❑ Laser process equipment
Pressurized systems
❑ Power Plants
❑ Underground tanks, cables, and pipes
❑ High purity gas handling systems
❑ Bioreactors and fermenters
❑ Liquid gas manufacturing facilities
❑ Fuel tanks and bladders
B.4.3 System Integrated Leak Detection
Manufacturers of large, complex systems may choose to integrate into those systems a
component leak detector that can facilitate the on-going maintenance of leak-free integrity,
thereby providing additional value to their customers. The Agilent VS C15 provides the
necessary elements for flexible integration of leak detection capability into a large system.
Examples of these systems are:
❑ Semiconductor process equipment
❑ PVD/CVD equipment
❑ E-beam and ion beam processing equipment
B.4.4 Mass Produced Parts
Some manufacturing processes require the integration of a leak-checking device into a
multi-step process, usually with very high production rates. Component leak detectors are
designed specifically for these applications in which a vacuum system and the control
electronics may be mounted separately. The Agilent VS C15 offers the ultimate flexibility in
a helium mass spectrometer leak detection system. The flexibility, ruggedness and rapid
response time of these units allows for accurate, repeatable, high volume leak testing in
demanding production environments. Some examples include:
High Volume Manufactured Parts
❑ Automotive fuel systems
❑ Automotive brake components
❑ Cooling and refrigeration system components
❑ Medical devices
❑ Automotive airbag components
❑ Tire and wheel assemblies
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