Agilent Technologies VS Series User Manual

Table 3-1 Leak Detector Valve State Table - Single Mechanical Pump System
Leak Detector
Operating State
V1
Foreline
Valve
V2/V3
Contra-Flo
w V
alve
Test Mode
V4/V5
Midstage
Va
lve
Fine Test
Mode
V6
Calibrated
Le
ak
V7
Vent
Valve
V8*
Ballast
Valve
V8*
Exhaust
Valve
Vent O C C C O C O
Rough C O C C C C C
Gross Leak Test C O C C C C N/A
Contra-Flow Test O O C C C C O
Midstage Test O C O C C C O
Hold O C C C C C O
Sniff O O C C C C O
Read Std Leak O C C O C C O
O: Open C: Closed
VS Series Helium Mass Spectrometer Leak Detectors
3-12
DRAFT 4/
23/15
Figure 3-7 Leak Detector Vacuum System Diagram
* Normally open valve, powered closed during all operations.
** Model PD03, MD15,
BD15, MD30+ during the roughing sequence.
Tes t Po rt
Spectrometer
Tes t Po rt t her moc ou pl e
Calibrated Leak
V5
V4
V2 V3
V6
V7
V1
V1 Foreline
V2 Contraflow1
V3 Contraflow2
V4 Midstage1
V5 Midstage2
V6 Cal Leak
V7 Vent
*V8 Exhaust
*
V8
**

Agilent Technologies VS Series Specifications

General

Brand	Agilent Technologies
Model	VS Series
Category	Security Sensors
Language	English