Preamble
UM-22100H-U User manual ATEQ D520 Page 5/122
PREAMBLE
1. DEFINITION OF THE ATEQ D520
The ATEQ D520 is a flow meter which measures a drop in pressure with a differential
sensor (transducer) which is placed at the extremities of a calibrated flow tube.
Test part
Air pressure
supply
Absolute pressure
sensor
Caloibrated flow tube
Regulator
Atmosphere
Differential
pressure sensor
Flow
Dp
When fluid (gas) moves through a calibrated flow tube (laminar flow), a drop in pressure
occurs, the value of which is proportional to flow.
∆P = 8µLQ/πR
4
µ: viscosity of the fluid
L: length of the calibrated flow tube
R: radius of the calibrated flow tube
Q: flow
∆P: drop in pressure in the calibrated flow tube