Field Service Manual December 2003
Page 202 of 276
Focus alignment :
Remark: Before starting the ‘scank’ command be sure that all the parameters are
correct set refering to “
Adjustment procedure Optics 600 - Setting the default
parameters”
The covered way from B0 and B20 is not the same.
This results in a different focus point.
Look for equal and minimal spot sizes:
-> beams B0(min) = B20(min)
1. First check the actual spot size for beams B0 and B20.
LTL > -1 1 22 gpar $100001 1000 SCANK
2. Change the position of the doublet by one turn with the adjustment
screw.
3. Measure the spot size again with the "SCANK" command.
If the spot size increases, turn the adjustment screw in the opposite
direction.
4. Repeat this until you have found the right value.
5. Tighten up the screws from the doublet.
6. Execute "SCANK" for all the beams:
LTL > -1 1 22 gpar $ffffff 1000 SCANK
Remark
Spot diameter: about 7 um for a basic resolution of 4000ppi
Angle Abbe König prisma
The angle of the Abbe König prism is adapted so that the distance
between the position of B0 and B23 is -298,45 um for a basic
resolution of 4000 ppi, number of beams 24(par5), resolution
4000(par4), linear correction(par10,11,97&98 should be 0)
Align the Abbe König prism for the correct angle: the angle is
correct when the "Diff.Pos" and "Soll" values are almost the same in the
procedure "SCANK". Delta is difference between"Diff.Pos" and "Soll".
Delta should be within 3um
LTL > -1 1 22 gpar $100001 1000 SCANK
Change the Abbe König prism angle by turning into the set screws.
Remark :
Tighten the position with the center screw every time before executing
"SCANK".
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