Edwards SCU-800 - Page 129

SCU-800 Control Unit for Turbomolecular Pump
MT-49E-101-G
Page 117
7
MAINTENANCE
Referred
section
7.1.1
3.6
.3
Section 3.6.3 Section 2.1
Instruction manual
(B)
Instruction manual
(B)
4.1.1 4.1.2
Table
37 - Error
messages after self test (continued)
Countermeasures
1. Contact
Serv
ice office
.
2. Contact
Service office
.
Change the AC input voltage 200V.
Contact
Service office
.
1. Check whether or not a
power failure has occurred.
2. Connect the power cable
correctly.
3. Replace the power cable. 4. Set the voltage to the rated
voltage
±10%
.
1. Set the t
emperature of the
baking heater to 120 ºC (248 ºF) or less.
2. At the time of baking or gas
pumping, always cool the STP
pump.
3. Check the piping system
for leakage.
4. Repetition
s start/stop
operations may cause the STP
pump to overheat.
Probable causes
1. Failure
of the STP
pump.
2. Failure of the SCU
-800.
Incorrect connection of the input power supply
.
Failure of the STP
pump
.
1. Power failure.
2. Incorrect connection of the
power cable.
3. Failure of the power cable. 4. Insufficient power supply
voltage.
1. Overheating during ba
king.
2. Insufficient cooling. 3. Leakage of the vacuum
piping system.
4. Repetition start/stop
.
operations.
Pump operation
Touch down. The magnetic bearing output stops and the rotor is descended on the
touch down
bearing.
Touch down. The magnetic bearing output stops and the rotor is descended on the
touch down
bearing.
Decelerate and stop.
Decelerate and stop.
Decelerate and stop.
Occurrence condition
Excessive magnetic bearing electric current continues for 30 sec.
Connection of the STP pump not correspo
nding to
the input power supply (100V).
Disconnection of the temperature sensor of the STP
pump
.
Insufficient power supply.
Overheating inside the STP
pump
.
LCD Messages
Inordinate Current
Insufficient Supply
M_Temp Sensor Lost
Mains Failure
Motor Overhe
at