Edwards SCU-801

SCU-801 Control Unit for Turbomolecular Pump
MT-95E-001-A
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PAGE
vi
TABLES
Table Title Page
1 Turbomolecular pumps 7
2 SCU-801 front panel functions 14
3 SCU-801 front panel functions (continued) 15
4 SCU-801 rear panel connection 16
5 STP connection cable specification 21
6 Power cable 24
7 User setting data list 29
8 Causes of "CAUTION" at the self test state 48
9 REMOTE X7 input signal pins 52
10 REMOTE X7 output signal pins 54
11 Rated contacts for relays CR1 to CR10 56
12 Starting/Stopping the STP pump during remote operation
(REMOTE X7) 56
13 Rotation INHIBIT signal input 57
14 Reset operation during remote operation (REMOTE X7) 58
15 TMS Function setting value and indication 60
16 X3A/X3B pin position 62
17 X6 pin position 63
18 Communication parameters 66
19 Transmission control characters 70
20 Pump operation commands 80
21 Command list 85
22 Pump operation commands 87
23 Error message values 89
24 Error message values (continued) 90
25 Pump operation mode 91
26 Remote mode 96
27 Warning value bit assign 100
28 Functions of STP-Link 105
29 Backup rotational speed 109
30 States of LCD, LEDs and REMOTE output signals
at a power failure 110
31 Accumulated damage point and warning message 114
32 Default setting of "WARNING" function 116
33 Factory setting and variable range 116
34 Error messages at self test state 117
35 Error messages after self test 120
36 Error messages after self test (continued) 121
37 Error messages after self test (continued) 122
38 Error messages after self test (continued) 123
39 Error messages after self test (continued) 124
40 Error messages after self test (continued) 125
41 Error messages after self test (continued) 126
42 Error messages after self test (continued) 127
43 Troubleshooting when powering ON 128
44 Troubleshooting when performing the STP pump
start operation 128
45 Troubleshooting while the STP pump is rotating 129