STP-iXR1606 Turbomolecular Pump
MT-79E-001-D
Page 114
5
SERIAL COMMUNICATION PROTOCOL
Parameter Item Data format Remarks
12 Serial communication time out
setting (Unit: sec.)
16-bits hexadecimal
coded ASCII
60 sec. step
13 [System reservation] 88-bits hexadecimal
coded ASCII
Parameter Item Setting range
1 Input operation port setting
I/O REMOTE (X2): 01
hex
COM1 (X3): 02
hex
COM2 (X4): 05
hex
COM3 (X5 STP-LINK): 06
2
TMS Option
Enable/Disable setting
00
hex
: ENABLE
FF
:DISABLE
4 Second Damage Limit Option
Enable/Disable setting
00
hex
: ENABLE
FF
:DISABLE
5 First Damage Limit Warning
Enable/Disable setting
00
hex
: ENABLE
FF
:DISABLE
6
Pump Runtime Over Warning
Enable/Disable setting
00
hex
: ENABLE
FF
:DISABLE
7
Pump Runtime Over Warning
Hours setting
0 to 1,000×100 hours
(00000000
to 000003E8
)
8
Imbalance Warning
Enable/Disable setting
00
hex
: ENABLE
FF
:DISABLE
9
Pump Overload Warning
Enable/Disable setting
00
hex
: ENABLE
FF
:DISABLE
10
Pump Overload Warning
Motor current setting
0 to 1,000×0.1 %
(0000
to 03E8
11
Pump Overload Warning
Rotational speed setting
0 to 1,000×0.1 %
(0000
to 03E8
)
12 Serial communication
time out setting
0 to 30,000sec.
(0000
hex
to 7530
hex
)
Round down to the 60 seconds
Set to 0 to disable function
*1 Valid only with TMS specification
Table 33 - Parameter setting value