Edwards STP Series

STP-iXR1606 Turbomolecular Pump
MT-79E-001-D
Page 123
5
SERIAL COMMUNICATION PROTOCOL
Parameter 6a 6b 6c 6d
ASCII
F F 0 0 0 0 0 0 0 0 0 0 0 0
*1
*1
*1
*1
*1
*1
HEX
46 46 30 30 30 30 30 30 30 30 30 30 30 30
Parameter 7a 7b
[Omitted]
21d
ASCII
F F 0 0 0 0
*1
*1
*1
*1
*1
*1
HEX
46 46 30 30 30 30
Parameter 22a 22b 22c 22d
ASCII
F F 0 0 0 0 0 0 0 0 0 0 0 0
*1
*1
*1
*1
*1
*1
HEX
46 46 30 30 30 30 30 30 30 30 30 30 30 30
*1 System reservation