Edwards STP Series User Manual

STP-iXR1606 Turbomolecular Pump
MT-79E-001-D
Page 146
7
SAFETY FUNCTIONS
Referred
Section
*1
Valid only with TMS specification
Table 47 - Error List (continued)
Countermeasures
1.
Contact Service office.
2.
Contact Service office.
1.
Contact Service office.
2.
Connect the cable securely.
3.
Contact Service office.
4.
When the TMS function is not in use, set the "TMS Option" to "DISABLE" with display unit iDT-001 or STP-Link.
Probable causes
1.
Failure of the TMS heater.
2.
Failure of the TMS unit.
1.
Disconnection of the TMS sensor.
2.
Disconnection of the external TMS connection cable.
3.
Failure of the external
TMS
connection cable.
4.
Incorrect setting of the TMS function.
Occurrence
condition
TMS temperature
control error
(when the TMS
unit
detection
temperature
becomes lower
than the setting
value by 10
°C
(
-18 ºF) or more.
E
rror is not
detected for a
certain time after
the STP pump
starts.
TMS sensor is not
connected when
the state "TMS
Option
" is
"ENABLE"
.
Pump operation
D
ecelerate and
stop
D
ecelerate and
stop
(Error message)
TMS Lower
Temp
*1
TMS
Sensor Lost
*1
"FAILURE"
LED
Steady red

Edwards STP Series Specifications

General

Brand	Edwards
Model	STP Series
Category	Water Pump
Language	English