STP-iXR1606 Turbomolecular Pump
MT-79E-001-D
Page 37
INSTALLATION
3
2 15
1. Vacuum equipment
2. Inlet port flange
3. Washer
4. Torque reduction mechanism
5. Bolt insert position
Figure 20 - Bolt position for securing the flange
(i) When the base is
not secured
(ii) When the base is secured
1. Recommended fitting bolt for flange
2. Secure the base (legs)
Figure 21 - Methods of securing the STP pump
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3
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