Edwards STP Series

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STP-iXR1606 Turbomolecular Pump

MT-79E-001-D

Page 68

OPERATION

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Table of Contents3
Introduction11
Scope and Definitions11
Applied Standards12
Limited Warranty13
Warranty Period13
Item Warranted13
Disclaimer14
Spare Parts14
Precautions for Safe Operation of the STP Pump15
Usable Gases15
Maintenance and Inspection Precautions16
Labels16
STP Pump Installation Warning Label16
Hot Surface Warning Label16
Heavy Product Caution Label17
High Voltage Device Caution Label17
Operation Principle of the STP Pump18
STP Pump Specification20
Technical Data21
STP Pump Specifications21
Maximum Gas Flow-Rate22
Water Cooling Use Condition23
Control Unit24
External Appearance of the STP Pump26
External Appearance of STP-Ixr160626
Label Affixing Positions27
Installation of the Stp Pump29
Precautions before Installation29
Operating Environment29
Installation Area31
Space Around the STP Pump31
Bench32
Insulation Test32
Unpacking and Installation33
Example of Lifting the STP Pump33
Eyebolt Size33
Example of Lifting the STP Pump (Horizontal Positioning)34
STP Pump with Eyebolts36
Name and Function of each Part37
Name and Function of the Pump37
Configuration of the STP Pump37
Control Unit (Front Panel)37
Pump Functions37
Name and Function of the Control Unit38
Control Unit Front Panel Functions39
Control Unit Front Panel Functions (Continued)40
How to Install the STP Pump41
Installation of the STP Pump to the Vacuum Equipment41
Cleaning the Seal42
STP Pump Installation Positions43
Positions of the Outlet Port on the Horizontally or Slanted Installed STP Pump43
Secure the STP Pump44
Tightening Torque of Bolt44
Maximum Torque Predicted and Recommended Securing Bolt for Inlet Port Flange45
Legs for Securing the Base48
Screw Holes for Securing the Base48
Power Cable49
How to Connect the Power Cable51
Precautions of Vacuum Piping53
Vacuum Piping Method54
(For the STP Pump Equipped with Purge Port)54
Height of Purge Port54
Connecting the Water Cooling Pipe55
Positions of the Cooling Water Port55
Attaching a Baking Heater56
Connecting to Semiconductor Equipment57
Connecting to Power57
Emergency off Circuit (EMO Circuit)57
Operation59
Gas Pumping, Cooling and Baking the STP Pump59
Gas Pumping59
How to Introduce a Purge Gas60
Cooling the STP Pump60
Water-Cooling Method60
Baking the STP Pump61
Before Starting the STP Pump62
Confirmation before Starting62
Confirmation of Vacuum System62
Powering on63
Pump Operation63
Input Operation Port Setting63
Starting/Stopping the STP Pump64
Pump Operation Method64
Starting/Stopping the STP Pump (X2 REMOTE)64
How to Start/Stop the STP Pump65
Starting the STP Pump after Stopping65
Starting the STP Pump after a Safety Function Operates65
Powering off65
Reset Operation (X2 REMOTE)65
Led66
Parallel Port Input/Output Signal67
Input Signal Pins67
X2 REMOTE Connector67
X2 REMOTE Input Signal Pins68
X2 REMOTE Input Signal Pins (Continued)69
X2 REMOTE Input Signal Pins (Contact Input)70
Input Operation Port Setting71
Rotation INHIBIT Signal72
Rotation INHIBIT Signal Input72
Second Speed Option73
Second Speed Function73
Output Signal Pins74
X2 REMOTE Output Signal Pins75
X2 REMOTE Output Signal Pins76
X2 REMOTE Output Signal Pins (Continued)76
Serial Communication Protocol79
Introduction79
Connection and Setting up80
Signal Connection80
Connecting the RS48582
Communication Parameter Setting83
Communication Parameters83
Input Operation Port Setting84
Serial Port84
Input Operation Port84
Serial Communication Timeout Setting85
Serial Communication Time out Setting85
Recommended Items about Communication Cable Installation86
Grounding Example (both Ends Grounding)86
Grounding Example (Single Point Grounding)86
Protocol Specifications89
General Description89
Standard Transmission Frame (in the RS232/RS485 Single Point Connection)90
(In the RS232/RS485 Single Point Connection)91
Query Command92
(In the RS232/RS485 Single Point Connection)92
Transmission Data Format93
Frame Control (Checksum)94
Error Control94
Transmission Frame in the RS485 Multi-Point Connection94
Control Command in the RS485 Multi-Point Connection96
5.3.10 Query Command in the RS485 Multi-Point Connection97
5.3.11 Broadcasting Command in the RS485 Multi-Point Connection98
Pump Operation Commands98
5.3.12 Application Note99
Example of Answer Resending Process100
Example of Command Sending During Answer Data Reply100
Command Specifications103
Command List103
Readmeas104
Command104
Readfailmess105
Pump Operation Commands105
Error Message Values107
Error Message Values (Continued)108
Readmodfonct109
Pump Operation Mode110
Readversion111
Readcounters112
Readsetpoint113
Readmotortemp113
5.4.10 Readstatus114
5.4.11 Readevents115
Remote Mode115
5.4.12 Setspeedsetpoint116
5.4.13 Readspeedsetpoint117
5.4.14 Readmodfonctwithwarning118
5.4.15 Readmeasvalue121
5.4.16 Readoptionfunc123
5.4.17 Setoptionfunc126
5.4.18 Readcondition128
5.4.19 Readeventswithtime130
5.4.20 Setoptions134
Second Speed Option Setting134
Option Function Number and Parameter List134
5.4.20.2 Second Speed Selection135
5.4.21 Readoptions136
5.4.21.1 Second Speed Function Setting136
5.4.21.2 Second Speed Select137
Stp-Link and Display Unit139
STP-Link139
Display Unit140
Safety Functions141
Power Failure141
Operation after a Power Recovery142
States of Leds and X2 REMOTE Output Signals at Power Failure142
Abnormal State of Magnetic Bearing (Disturbance)143
Excessive Vibration (Disturbance)143
Motor Driver Overload (DRV Overload)143
Overheating Inside the STP Pump (MOTOR Overheat)143
Overheating Inside the Control Unit (CNT Overheat)143
Overspeed144
WARNING" Function144
WARNING Function144
Contents of WARNING Function146
First Damage Limit146
Second Damage Limit146
Pump Run Time over146
Pump Overload147
Imbalance147
WARNING Function Setting148
Default Setting of WARNING Function148
Factory Setting and Variable Range148
Troubleshooting Immediately after Failure Occurs149
After Power Failure149
After Other Abnormality/Error149
Troubleshooting150
Indication of "FAILURE" LED (Red)150
Indication of "FAILURE" LED (Green)157
No Indication of the "FAILURE" LED157
Maintenance and Inspection159
Cleaning160
Inspecting the Deposit160
Maintenance161
Recommended Overhaul Intervals161
Standard Replacement Parts161
Recommended Maintenance Intervals for Main Parts162
Transporting for Repair or Overhaul163
Storage and Disposal165
Storage of the STP Pump165
Disposal166
Service, Spares and Accessories167
Introduction167
Service167
Spares167
Accessories168

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