Essemtec Fox - Page 120

Corrective Maintenance
5-16 © Essemtec AG Fox Maintenance
0000074/05
/ March 31, 2017
Initial Information
A 'ZT element' includes the whole mechanism
for one Z linear axis and one Theta rotation axis
(translation and rotation axes), see picture.
On the head, each ZT element has its own
vacuum valve (venturi valve).
Remove Head Cover (if not already removed)
From the front side of the machine, loosen and
remove the 2 fixing screws of the cover.
Remove the cover.
On top of the head, loosen and remove the 3
fixing screws of the top cover (see picture).
Carefully remove the cover.