Essemtec Fox - Malfunction Table; Preparation

Corrective Maintenance
Fox Maintenance © Essemtec AG 5-3
0000074/05
/ March 31,
2017
5.2 Malfunction Table
The table lists the effect of possible malfunctions and shows the appropriate cause and procedure
to resolve it.
Effect / Malfunction
Possible Cause
Fixing Procedure
ZT element does not rotate properly (error
message on GUI)
In case of repetitive blocking/errors on the theta
axis, check the rotation of the Z axis by hand. If
the rotation feels sluggish or seized, the
corrective maintenance should be performed.
• Contaminated
vacuum
feedthrough
Vacuum Feedthrough
Cleaning and
Lubricating (see page
5-5)
Bad vacuum (error message on GUI)
• Broken silicon
tubes on head
• Contaminated
silicon tubes
Silicon Tube rinsing or
replacement (see page
4-50)
5.3 Preparation
For corrective maintenance, it is mandatory to switch off the machine and disconnect from
electrical power and compressed air.
Stopping Production
Any Tab
Any Menu
Any Submenu
(STOP button)