Handheld Tester Emulator Test Suite
2
PAGE 89
Figure 89 - Test N Setup Screen
Figure 90 - Test N In Progress
Active Mode Functionality Test N
Verify Port Sensors - Part 2
Verify Port Sensors tied to E84 signals - Part 2
(Presence sensor(s) activated during Load, but
Placement sensor(s) is not).
Test N is implemented using a standard Load Cycle test. The
Load Cycle screen is displayed, and the HHT advances the
E84 handshake up to the point where the UUT is waiting for
the delivery of a FOUP.
At this point, the HHT prompts the operator to activate the
Presence sensor(s) only. The Presence sensors must remain
activated until the displayed count down timer expires. At
that point, the UUT should issue a TP3 timeout error.
If the UUT drops it’s L_REQ signal following the Presence sensor
activation, the HHT will fail the test. This indicates that the UUT
is accepting a mis-aligned FOUP delivery as a valid handoff.
If the TP3 timeout occurs without the L_REQ signal dropping,
the HHT marks the test as passed.
Handheld Tester Emulator Test Suite
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PAGE 90
Figure 91 - Test O Setup Screen
Active Mode Functionality Test O
Verify Port Sensors - Part 3
Verify Port Sensors tied to E84 signals - Part 3 (Placement sensor(s) deactivated during Unload,
but Presence sensor(s) is not).
The setup screen for Test O instructs the operator to activate
all Placement and Presence sensors on the UUT. The operator
should make sure all sensors are activated prior to starting the
test.
Test O is implemented using a standard Unload Cycle test.
The Unload Cycle screen is displayed, and the HHT advances
the E84 handshake up to the point where the UUT is waiting
for the removal of the FOUP.
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