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Figure 92 - Test O In Progress
At this point, the HHT prompts the operator to deactivate the
Placement sensor(s) only. The Presence sensors must remain
activated until the displayed count down timer expires. At
that point, the UUT should issue a TP3 timeout error.
If the UUT drops it’s U_REQ signal following the Placement
sensor deactivation, the HHT will fail the test. This indicates
that the UUT believes the FOUP has been properly removed
when the Presence sensor(s) is still activated.
If the TP3 timeout occurs without the U_REQ signal dropping,
the HHT marks the test as passed.
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Figure 93 - Test P Setup Screen
Active Mode Functionality Test P
Verify Port Sensors - Part 4
Verify Port Sensors tied to E84 signals - Part 4 (Presence sensor(s) deactivated during Unload, but
Placement sensor(s) is not).
The setup screen for Test P instructs the operator to activate all Placement and Presence sensors on the
UUT. The operator should make sure all sensors are activated prior to starting the test.
Test P is implemented using a standard Unload Cycle test.
The Unload Cycle screen is displayed, and the HHT advances
the E84 handshake up to the point where the UUT is waiting
for the removal of the FOUP.