Get Control E84 - Single handoff sequence for Loading

Handheld Tester Emulator Test Suite Worksheet
3
PAGE 105
Figure 99 - Single Handoff - Load
[P] [F] C. Single handoff sequence for Loading: All steps must occur in the prescribed order to pass:
9. Verify that the HO_AVBL signal is ON on the equipment
10. Set the CS_0 signal ON and CS_1 signal OFF on the
E84 HHT
11. Set the VALID signal ON on the E84 HHT
12. Verify that the equipment turns the L_REQ signal ON
13. Set the TR_REQ signal ON on the E84 HHT
14. Verify that the equipment turns the READY signal ON
15. Set the BUSY signal ON on the E84 HHT and place the
FOUP on the loadport associated with the E84
interface being tested
16. Verify that the equipment turns the L_REQ signal OFF
17. Set the BUSY signal OFF, TR_REQ signal OFF and
COMPT signal ON on the E84 HHT
18. Verify that the equipment turns the READY signal OFF
19. Set the COMPT, VALID and CS_0 signals OFF on the
E84 HHT
Notes:
Handheld Tester Emulator Test Suite Worksheet
3
PAGE 106
[P] [F] C. Single handoff sequence for Loading - 2
nd
Run (see Figure 99): All steps must occur in the
prescribed order to pass:
1. Verify that the HO_AVBL signal is ON on the equipment
2. Set the CS_0 signal ON and CS_1 signal OFF on the E84 HHT
3. Set the VALID signal ON on the E84 HHT
4. Verify that the equipment turns the L_REQ signal ON
5. Set the TR_REQ signal ON on the E84 HHT
6. Verify that the equipment turns the READY signal ON
7. Set the BUSY signal ON on the E84 HHT and place the FOUP on the loadport associated with
the E84 interface being tested
8. Verify that the equipment turns the L_REQ signal OFF
9. Set the TR_REQ signal OFF, BUSY signal OFF and COMPT signal ON on the E84 HHT
10. Verify that the equipment turns the READY signal OFF
11. Set the VALID, COMPT, and CS_0 signals OFF on the E84 HHT
Notes: