Handheld Tester Emulator Test Suite
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PAGE 93
Figure 94 - Test P In Progress
At this point, the HHT prompts the operator to deactivate the
Presence sensor(s) only. The Placement sensors must remain
activated until the displayed count down timer expires. At
that point, the UUT should issue a TP3 timeout error.
If the UUT drops it’s U_REQ signal following the Presence sensor
deactivation, the HHT will fail the test. This indicates that the
UUT believes the FOUP has been properly removed when the
Placement sensor(s) is still activated.
If the TP3 timeout occurs without the U_REQ signal dropping,
the HHT marks the test as passed.
Handheld Tester Emulator Test Suite
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PAGE 94
Figure 95 - Test Q Setup Screen
Figure 96 - Test Q In Progress
Active Mode Functionality Test Q
Verify Emergency Stop
Verify Emergency Stop operation.
Test Q is implemented using a standard Unload Cycle. The
operator should make sure a FOUP is properly placed on the
UUT prior to starting the test.
The Unload Cycle screen is displayed, and the HHT advances
the E84 handshake up to the point where the UUT is waiting
for the removal of the FOUP.
At this point, the HHT prompts the operator to press the UUT’s
Emergency Stop (EMO) button. The EMO button must be
pressed before the displayed count down timer expires.
The UUT should drop it’s ES signal.
If the UUT does not drop it’s ES signal before the displayed
count down timer expires, the test fails. The UUT will issue a
TP3 timeout error at this point.
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