Handheld Tester Emulator Test Suite Worksheet
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HHT Test Suite Worksheet
This section provides a test worksheet for use while running HHT Test Suite tests. It includes details for each
test in the HHT Test Suite, along with user comment fields. The HHT does not provide a method of
entering test related comments. This worksheet is intended to be used during HHT Test Suite testing, and
provides a manual method for recording test related comments.
Instrumentation, Tools, Other
• 1 person (3 hrs)
• tape measure
• metric scale
• E84 HHT
• this HHT Test Suite Worksheet
Setup Procedure
The unit under test (UUT) must be fully assembled as for normal operation with power applied. The E84
HHT must be set to run the Emulator Test Suite (select option 1 - Standard Cycle Test from Main Test
Menu, then option 5 - Emulator Test Suite).
Handheld Tester Emulator Test Suite Worksheet
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Tests C and D will be tested twice to verify the equipment does not require a specific order of
signals at the transfer complete and release of CS sequences of the E84 handoff.
When loading a FOUP during Test C, the FOUP should be loaded such that the placement
sensor is blocked approximately 5 seconds after the presence sensor (where possible).
When unloading a FOUP during Test D, the FOUP should be unloaded such that the presence
sensor is unblocked approximately 5 seconds after the placement sensor (where possible).
Active Mode Static Tests
Ensure that E84 parallel I/O interface plug(s) are mounted on the top of the equipment per SEMI* E84.
Ensure 1 plug is provided for each equipment load port. Ensure that documented recovery procedures
exist per SEMI* E84.
Active Mode Functionality Tests
Ensure functionality of the E84 interface device per the SEMI* E84 standard.
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