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Chapter 4 REGISTRATION MARK SETTINGS AND DETECTION
4.10 Setting the Sensing Interval
Ifthelinesegmentsarene,registrationmarksmaynotbedetectedevenwhentheslowestregistration
mark detection speed has been set. If the interval has been set to 0, the registration marks are detected
through sampling during movement. If the interval is set to 5, 10 or 15µ, registration marks are sensed at the
speciedinterval.
The sensing interval setting is only enabled for registration mark pattern 3.
(1) Press the [PAUSE] key to select PAUSE mode.
(2) Press the
[NEXT] key repeatedly until the following menu is displayed.
FORCE OFFSET
SPEED QUALITY
MARK TOOL U/D
BUFFER CLR. VIEW
(3) Press the [F1] key (MARK) to display the registration mark functions selection menu.
FORCE OFFSET
SPEED QUALITY
MODE DIST ADJ
TYPE OTHER SETUPS
(4) Press the [F4] key (OTHER SETUPS) to display the menu shown below.
FORCE OFFSET
SPEED QUALITY
SIZE ADJ. SENS
ORG OFT SENS OPT
(5) Press the [F4] key (SENS OPT) to display the menu shown below.
FORCE OFFSET
SPEED QUALITY
LEVEL
SENS SPD SENS STEP
(6) Press the [F4] key (SENS STEP) to display the menu shown below.
FORCE OFFSET
SPEED QUALITY
TYPE 3 SENSING INTVL
NO. OF STEPS= 5 um
Use the [ ] or [ ] key to move the blinking cursor, and the[ ] or [ ] key to change the numeric value. When
the displayed setting is satisfactory, press the
[ENTER] keytoconrmyourselection.
Setting range: 0, 5, 10, 15 (µm) [Default value: 0]
Setting a lower value enables sensing to be performed more easily. If 0 has been selected, registration mark sensing
is performed continuously.
(7) Press the
[PAUSE] key to cancel PAUSE mode.