Honeywell Vertex M - Section 2

Symbol Name Filter Type A Filter Type B Filter Type C
B
2
H
6
Diborane X
DMA Dimethylamine X X
F
2
Fluorine X X
GeH
4
Germane X
HBr Hydrogen Bromide X X
HBr LL Hydrogen Bromide (Low Level) X X
HCl Hydrogen Chloride X X
HCl LL Hydrogen Chloride (Low Level) X X
HCN Hydrogen Cyanide X
HF Hydrogen Fluoride X X
HF LL Hydrogen Fluoride (Low Level) X X
HI Hydrogen Iodide X X
H
2
Se Hydrogen Selenide X
H
2
S Hydrogen Sulfide X
H
2
S LL Hydrogen Sulfide (Low Level) X X
NO
2
Nitrogen Dioxide X
NF
3
Nitrogen Trifluoride X
COCl
2
Phosgene X
PH
3
Phosphine X
SiH
4
Silane X
SO
2
Sulfur Dioxide X X
TBA Tert-butyl Arsine X
TBP Tert-butyl Phosphine X
TDMAT Tetrakis (DimethylAmino) Titanium X X
Table 8-1. Sample Filter Requirement Vertex M General Specifications
Vertex M 166 User Manual