Gas Name
1
TLV LAL LDL
Default
Alarm
Level 1
Default
Alarm
Level 2
Range Alarm Setting
Initial Ana-
lysis Period
(second)
Time to 1 TLV (Alarm @ 2 TLV Concentration 10-ft.
Sample Line)
Chemcassette
Part Number
Chlorine XPV
Chlorine-3 (Cl
2
/LL)
0.1ppm
0.030
ppm
0.010
ppm
0.050
ppm
0.100
ppm
0-1.000
ppm
0.030-0.049 ppm
0.050-0.099 ppm
0.100-0.199 ppm
0.200-1.000 ppm
120
120
90
60
<60sec (Alarm @ 0.1ppm with 0.2ppm Cl
2
gas) 1295-0565
Diborane (B
2
H
6
) 100 ppb 20 ppb 15 ppb 100 ppb 200 ppb 0-1000 ppb
20-99 ppb
100-199 ppb
200-299 ppb
300-1000 ppb
60
45
30
15
<40 sec 1295-0300
Diborane XP (B
2
H
6
) 100 ppb 15 ppb 10 ppb 100 ppb 200 ppb 0-1000 ppb
15-49 ppb
50-99 ppb
100-1000 ppb
60
45
30
<40 sec 1295-0226
Diborane XP4 (B
2
H
6
) 100 ppb 15 ppb 10 ppb 100 ppb 200 ppb 0-1000 ppb
15-49 ppb
50-99 ppb
100-1000 ppb
60
45
30
<40 sec 1257-9300
Dimethylamine
(DMA)
5 ppm 0.4 ppm 0.3 ppm 5 ppm 10 ppm 0-30 ppm
0.4-2.4 ppm
2.5-4.9 ppm
5-30 ppm
120
60
30
<40 sec 1295-0221
Dimethylamine XP
(DMA)
5 ppm 0.5 ppm 0.5 ppm 5.0 ppm 10.0 ppm 0-50.0 ppm
0.5-2.4 ppm
2.5-50.0 ppm
15
10
<20 sec 1295-0405
Dimethylamine XP4
(DMA)
5 ppm 0.5 ppm 0.5 ppm 5.0 ppm 10.0 ppm 0-50.0 ppm
0.5-2.4 ppm
2.5-50 ppm
15
10
<20 sec 1257-9309
Fluorine (F
2
) 0.1 ppm 0.1 ppm
0.06
ppm
1 ppm 2 ppm 0-10 ppm
0.1-0.9 ppm
1-10 ppm
60
30
<40 sec (Alarm @ 1ppm with 2 ppmF
2
gas) 1295-0220
Fluorine XP-Cl2-II
(F
2
)
0.1 ppm
0.060
ppm
0.060
ppm
1.000
ppm
2.000
ppm
0 - 10.000
ppm
0.060 -1.999 ppm
2.000 - 3.999 ppm
4.000 - 10.00 ppm
90
60
30
<110 sec (Alarm @ 0.1ppm with 0.2 ppmF
2
gas)
<25 sec (Alarm @ 1.0ppm with 2.0 ppmF
2
gas)
1295-0560
Fluorine XP-Cl2-II
(F
2
/LL) (Low Level)
0.1 ppm
0.050
ppm
0.030
ppm
0.100
ppm
0.200
ppm
0 - 1.000
ppm
0.050-0.199 ppm
0.200-1.000 ppm
120
60
<135 sec (Alarm @ 0.1ppm with 0.2ppmF
2
gas) 1295-0560
Fluorine XPV
Chlorine-3 (F
2
)
0.1 ppm 0.07 ppm
0.050
ppm
1.000
ppm
2.000
ppm
0-10.000
ppm
0.060-0.999 ppm
1-1.999 ppm
2.000-3.999 ppm
4.000-10.000 ppm
120
90
60
30
<110sec (Alarm @ 0.1ppm with 0.2ppm F
2
gas)
<35 sec (Alarm @ 1.0ppm with 1ppm F
2
gas)
1295-0565
Fluorine XPV
Chlorine-3 (F
2
/LL)
0.1 ppm 0.05 ppm
0.030
ppm
0.100
ppm
0.200
ppm
0-1.000
ppm
0.050-0.099ppm
0.100-0.199ppm
0.200-0.399ppm
0.400-1.000ppm
180
180
60
60
<155 sec (Alarm @ 0.1ppm with 0.2ppm F
2
gas) 1295-0565
Germane (GeH
4
) 200 ppb 100 ppb 85 ppb 200 ppb 400 ppb 0-2000 ppb
100 - 149ppb
150 - 199ppb
200 - 399ppb
400 - 2000ppb
90
90
60
60
<87sec (Alarm @ 200ppb with 400ppb gas) 1295-0566
TLV - Threshold Limit Value LAL - Lowest Alarm Level LDL - Lower Detectable Limit
1. ā-1ā calibrations allow more stain development but will extend response times
2. Minimum Sample Time